TITLE

Time-modulated electron cyclotron resonance plasma discharge for controlling generation of

AUTHOR(S)
Samukawa, Seiji; Furuoya, Shuichi
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/11/1993, Vol. 63 Issue 15, p2044
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the modulated electron cyclotron resonance plasma discharge for controlling the generation of CF[sub 2] radicals and F atoms in fluorocarbon gas plasmas. Modulation of microwaves with pulse circuit; Generation of CF[sub 2] radicals by chemical reaction; Detection of refractive index for deposited polymer on silicon surface.
ACCESSION #
4240828

 

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