Layer-by-layer growth of epitaxial SnO[sub 2] on sapphire by reactive sputter deposition

Cavicchi, R.E.; Semancik, S.
October 1992
Applied Physics Letters;10/19/1992, Vol. 61 Issue 16, p1921
Academic Journal
Examines the growth of epitaxial tin oxide semiconductor films grown on sapphire substrates by reactive sputter deposition. Use of low energy electron diffraction to assess the lateral registry of the film growth; Details on the lattice matching between the films and substrate; Utilization of atomic force microscopy to examine the surface morphology and roughness.


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