TITLE

Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change

AUTHOR(S)
Conley Jr., J.K.; Lenahan, P.M.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2889
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents evidence for deep electron traps and structural changes in separation by implanted oxygen oxides (SIMOX). Generation of electron spin resonance point defects in SIMOX buried oxides; Reasons attributed to the presence of large defect centers with negative net space charge; Generation of defect centers by vacuum ultraviolet light exposure of oxides.
ACCESSION #
4240726

 

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