TITLE

Mechanism of the growth of microcrystalline silicon

AUTHOR(S)
Jin Jang; Sung Ok Koh
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2874
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the behavior of silicon-bonded hydrogen atoms in hydrogenated amorphous silicon films. Application of the layer by layer deposition technique; Incorporation of hydrogen atoms with increasing exposure time; Use of a remote plasma chemical vapor deposition technique.
ACCESSION #
4240721

 

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