TITLE

In-process ellipsometric monitoring of diamond film growth by microwave plasma enhanced chemical

AUTHOR(S)
Hayashi, Yasuaki; Drawl, William
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2868
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Performs an in-process monitoring of diamond film growth with near-infrared ellipsometry. Application of microwave plasma enhanced chemical vapor deposition; Basis for the varying ellipsometric parameter trajectories; Characterization of diamond nucleation.
ACCESSION #
4240719

 

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