In-process ellipsometric monitoring of diamond film growth by microwave plasma enhanced chemical

Hayashi, Yasuaki; Drawl, William
June 1992
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2868
Academic Journal
Performs an in-process monitoring of diamond film growth with near-infrared ellipsometry. Application of microwave plasma enhanced chemical vapor deposition; Basis for the varying ellipsometric parameter trajectories; Characterization of diamond nucleation.


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