Enhanced nucleation and growth of diamond on SiC by plasma enhanced chemical vapor deposition

Yehoda, J.E.; Fuentes, R.I.
June 1992
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2865
Academic Journal
Investigates the nucleation and growth of diamond on silicon carbide by plasma enhanced chemical vapor deposition using thin film metals. Variation of iron (Fe) film thickness; Influence of Fe film thickness on growth rate and initial nucleation; Factors responsible for the enhanced nucleation.


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