TITLE

Relaxation by the modified Frank-Read mechanism in compositionally uniform thin films

AUTHOR(S)
LeGoues, F.K.; Eberl, K.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2862
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the relaxation of silicon germanide thin films using the modified Frank-Read mechanism. Penetration of threading dislocations on the upper layers of the film; Factors attributed to the occurrence of the mechanism in ungraded layers; Causes of the threading dislocations.
ACCESSION #
4240717

 

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