TITLE

Period-doubling bifurcation in a plasma reactor

AUTHOR(S)
Miller, Paul A.; Greenberg, K.E.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2859
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the period doubling bifurcation in a plasma reactor. Analysis of the drive frequency on the radio frequency voltage and current waveforms; Characteristics of the industrial reactor; Indication of the period doubling mechanism; Behavior of the direct current bias and etch rate above and below the bifurcation point.
ACCESSION #
4240716

 

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