TITLE

X rays in electron-cyclotron-resonance processing plasmas

AUTHOR(S)
Castagna, T.J.; Shohet, J.L.
PUB. DATE
June 1992
SOURCE
Applied Physics Letters;6/8/1992, Vol. 60 Issue 23, p2856
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the production of low-energy X-rays by electron-cyclotron-resonance processing plasmas. Detection of X radiation in nitrogen and methane plasmas; Correlation between X-ray flux and pressure; Estimation of hot electron temperatures from the slopes of the X-ray spectra.
ACCESSION #
4240715

 

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