TITLE

Laser-assisted organometallic chemical vapor deposition of films of rhodium and iridium

AUTHOR(S)
Cohan, Judson S.; Haojie Yuan
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/16/1992, Vol. 60 Issue 11, p1402
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Explores the organometallic chemical vapor deposition of rhodium and iridium thin films. Precursor of the films; Causal mechanism for the deposition of rhodium films; Usage of x-ray diffraction and x-ray photoelectron spectroscopy.
ACCESSION #
4240701

 

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