TITLE

Optical absorption in plasma-deposited silicon oxynitride films

AUTHOR(S)
Ance, C.; de Chelle, F.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/16/1992, Vol. 60 Issue 11, p1399
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the optical absorption of amorphous silicon oxynitride films. Growth of the films by chemical vapor deposition; Calculation of the optical absorption coefficient of the SiO[sub x]N[sub y]H[sub z] alloys; Variation of the optical gap with the composition and the appearance of step structures.
ACCESSION #
4240700

 

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