High-resolution electron microscopy of growth interruption effect on AlAs/GaAs interfacial

Ikarashi, Nobuyuki; Tanaka, Masaaki
March 1992
Applied Physics Letters;3/16/1992, Vol. 60 Issue 11, p1360
Academic Journal
Investigates the effects of growth interruption on the interfacial structure of aluminum arsenide/gallium arsenide grown by molecular beam epitaxy. Use of high-resolution transmission electron microscopy (TEM); Development of a TEM preparation technique; Increase in the intervals of the atomic step structures.


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