Atomic force microscope using piezoresistive cantilevers and combined with a scanning electron

Stahl, U.; Yuan, C.W.
November 1994
Applied Physics Letters;11/28/1994, Vol. 65 Issue 22, p2878
Academic Journal
Examines the use of piezoresistive cantilevers with an atomic force microscope operating with a scanning electron microscope. Compatibility of the microscopes; Presentation of grating and integrated circuit images; Methods for the detection of lever deflection.


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