TITLE

Atomic force microscope using piezoresistive cantilevers and combined with a scanning electron

AUTHOR(S)
Stahl, U.; Yuan, C.W.
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/28/1994, Vol. 65 Issue 22, p2878
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the use of piezoresistive cantilevers with an atomic force microscope operating with a scanning electron microscope. Compatibility of the microscopes; Presentation of grating and integrated circuit images; Methods for the detection of lever deflection.
ACCESSION #
4233224

 

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