TITLE

Effect of gas composition on texture of diamond films

AUTHOR(S)
Marinelli, M.; Milani, E.
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/28/1994, Vol. 65 Issue 22, p2839
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the microwave plasma-enhanced chemical vapor deposition of diamond films deposited on single-crystal silicon substrates. Presentation of unconventional gas mixtures for diamond texturing formation; Characterization of diamond films by scanning electron microscopy and x-ray diffraction; Correlation of texturing condition with diamond deposition.
ACCESSION #
4233210

 

Related Articles

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics