TITLE

Fast neutron irradiation for Czochralski grown silicon

AUTHOR(S)
Yuesheng Xu; Yangxian Li
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/28/1994, Vol. 65 Issue 22, p2807
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the invention of excellent intrinsic gettering through interaction between impurities and defects introduced by fast neutron irradiation into silicon. Irradiation of Czochralski grown silicon; Change of quality and density of point defects; Manifestation on the controlled precipitation of oxygen during heat treatment cycles.
ACCESSION #
4233199

 

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