TITLE

Boron doping of silicon using coalloying with aluminium

AUTHOR(S)
Lolgen, P.; Sinke, W.C.
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/28/1994, Vol. 65 Issue 22, p2792
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a technique for boron (B) doping of silicon. Formation of a B doping profile of more than 2 micrometer thickness; Presentation of atomic concentration profile of B and aluminum-doped silicon layer; Measurement of active doping concentration; Discussion on the applicability of fast low temperature B doping process in silicon solar cells.
ACCESSION #
4233194

 

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