TITLE

High-efficiency silicon solar cells by rapid thermal processing

AUTHOR(S)
Rohatgi, A.; Chen, Z.
PUB. DATE
October 1994
SOURCE
Applied Physics Letters;10/17/1994, Vol. 65 Issue 16, p2087
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the derivation of silicon solar cell efficiencies using rapid thermal processing (RTP). Importance of plasma enhanced chemical vapor deposition (PECVD) of SiN/SiO[sub 2] for surface passivation and antireflection coating; Fabrication of conventional cells by furnace diffusions; Reduction of gap between conventional and RTP/PECVD cells.
ACCESSION #
4233175

 

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