High-efficiency silicon solar cells by rapid thermal processing

Rohatgi, A.; Chen, Z.
October 1994
Applied Physics Letters;10/17/1994, Vol. 65 Issue 16, p2087
Academic Journal
Examines the derivation of silicon solar cell efficiencies using rapid thermal processing (RTP). Importance of plasma enhanced chemical vapor deposition (PECVD) of SiN/SiO[sub 2] for surface passivation and antireflection coating; Fabrication of conventional cells by furnace diffusions; Reduction of gap between conventional and RTP/PECVD cells.


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