Low specific resistance (<6X10[sup -6] OMEGA cm[sup 2]) TiC ohmic contacts to n-type beta-SiC

Parsons, J.D.; Kruaval, G.B.
October 1994
Applied Physics Letters;10/17/1994, Vol. 65 Issue 16, p2075
Academic Journal
Forms an array of transfer length measurement structures on an electrically isolated n-type beta-silicon carbide. Calculation of the specific contact resistance; Significance of linear curves in calculating standard error of linear regression of resistance on contact spacing; Growth of titanium carbide contacts by chemical vapor deposition.


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