Spatial profiling of ion and neutral excitation in noble gas electron cyclotron resonance plasmas

Rhoades, R.L.; Gorbatkin, S.M.
October 1994
Applied Physics Letters;10/17/1994, Vol. 65 Issue 16, p2004
Academic Journal
Profiles optical emission from neutrals and ions of noble gases in an electron cyclotron resonance plasma system. Dominance of neutral depletion in forming hollow profiles; Comparison of dominance between plasma density and electron temperature in hollow profiles formation; Measurement of spatial distribution of power deposited in plasmas.


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