TITLE

Electrochromism in tungsten oxyfluoride films made by chemically enhanced dc sputtering

AUTHOR(S)
Azens, A.; Stjerna, B.
PUB. DATE
October 1994
SOURCE
Applied Physics Letters;10/17/1994, Vol. 65 Issue 16, p1998
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the preparation of tungsten oxyfluoride films by reactive direct current sputtering in plasmas containing O[sub 2]+CF[sub 4]. Enlargement of deposition rate during promotion of chemical sputtering by heating the target; Evidence of large charge insertion/extraction on the films; Demonstration of high coloration efficiency.
ACCESSION #
4233145

 

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