TITLE

Characterization of interface topography of the buried Si-SiO[sub 2] interface in

AUTHOR(S)
Crowder, S.W.; Griffin, P.B.
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/26/1994, Vol. 65 Issue 13, p1698
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Characterizes the topography of the buried silicon-silicon dioxide interface using atomic force microscopy. Implication of the interface properties for the processing and device performance; Measurement of the root-mean-square surface roughness; Adjustment of the scan rate and setpoint voltage to yield quality images.
ACCESSION #
4233130

 

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