Reaction and regrowth control of CeO[sub 2] on Si(111) surface for silicon-on-insulator structure

Chikyow, T.; Bedair, S.M.
August 1994
Applied Physics Letters;8/22/1994, Vol. 65 Issue 8, p1030
Academic Journal
Investigates the interface structure of CeO[sub 2]/Si(111). Result of the reaction between CeO[sub 2] and Si at the interface; Effect of post annealing in oxygen atmosphere on crystalline CeO[sub 2] and SiO[sub 2] thickness; Usefulness of the modified structure of CeO[sub 2]/SiO[sub 2]/Si as a silicon-on-insulator structure.


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