Scanning tunneling microscopy based lithography of octadecanethiol on Au and GaAs

Lercel, M.J.; Redinbo, G.F.
August 1994
Applied Physics Letters;8/22/1994, Vol. 65 Issue 8, p974
Academic Journal
Uses scanning tunneling microscopy (STM) based lithography of octadecanethiol (ODT) on gold and gallium arsenide. Production of grating patterns by the STM modification in air; Necessity of biases of greater than 4 V for the fabrication of the raised lines; Transfer of the pattern in ODT and gold into the gold layer.


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