TITLE

Finite element analysis of stress relaxation in thin foil plan-view transmission electron

AUTHOR(S)
Hull, R.
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/18/1993, Vol. 63 Issue 16, p2291
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the use of finite element analysis to model stress relaxation in thin foil strained epitaxial layers. Comparison of stress relaxation with the unthinned structures; Use of plan-view transmission electron microscopy for epilayer stress relaxation; Modification of stress levels by thin foil relaxation effects.
ACCESSION #
4233053

 

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