Property modification of ferroelectric Pb(Zr,Ti)O[sub 3] thin films by low-energy oxygen ion

Hu, H.; Krupanidhi, S.B.
September 1992
Applied Physics Letters;9/7/1992, Vol. 61 Issue 10, p1246
Academic Journal
Enhances the electrical properties of ferroelectric Pb(Zr,Ti)O[sub 3] thin films using low-energy oxygen ion bombardment. Quantification of the bombardment effect; Dependence of the properties on the ion beam flux and bombarding ion energy; Ratio of the ion and atom between 1.0 and 1.3 and the bombarding energies.


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