TITLE

Synchrotron radiation assisted deposition of aluminum oxide from condensed layers of

AUTHOR(S)
Strongin, D.R.; Moore, J.F.
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/10/1992, Vol. 61 Issue 6, p729
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the production of pure layers of aluminum oxide from synchrotron irradiation of trimethylaluminum and water at seventy-eight kelvin. Use of near-edge x-ray absorption and core level photoelectron spectroscopies for aluminum oxide layer characterization; Removal of carbon in the alkylaluminum precursor; Analysis of synchrotron irradiation absence.
ACCESSION #
4232973

 

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