Stereo laser micromachining of silicon

Bloomstein, T.M.; Ehrlich, D.J.
August 1992
Applied Physics Letters;8/10/1992, Vol. 61 Issue 6, p708
Academic Journal
Presents technique for one micrometer resolution, high speed micromachining of three-dimensional silicon parts. Basis of the method on acousto-optic deflection of laser microchemical chlorine etching reactions; Significance of etchant gas exchant for organometallic vapor precursors; Need for primary patterning of three dimensional parts.


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