TITLE

Stereo laser micromachining of silicon

AUTHOR(S)
Bloomstein, T.M.; Ehrlich, D.J.
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/10/1992, Vol. 61 Issue 6, p708
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents technique for one micrometer resolution, high speed micromachining of three-dimensional silicon parts. Basis of the method on acousto-optic deflection of laser microchemical chlorine etching reactions; Significance of etchant gas exchant for organometallic vapor precursors; Need for primary patterning of three dimensional parts.
ACCESSION #
4232966

 

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