TITLE

Generation of positive charge in SiO[sub 2] thin films during electron irradiation

AUTHOR(S)
de Castro, A.J.; Fernandez, M.
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/10/1992, Vol. 61 Issue 6, p684
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents an explanation of Auger energy shifts of the silicon peak in silicon oxide thin films in relation to electron trapped charge distribution. Establishment of a simple model to explain bond breaking events; Significance of the centroid dependence of spatial distribution to the beam energy; Usefulness of the Auger electron spectroscopy.
ACCESSION #
4232958

 

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