Focused ion beam imaging of grain growth in copper thin films

Gupta, J.; Harper, J.M.E.
August 1992
Applied Physics Letters;8/10/1992, Vol. 61 Issue 6, p663
Academic Journal
Presents the use of scanning ion microscopy for the imaging of grain structure of pure copper films. Implications for grain growth in annealing temperature; Observation of the growth and coalescence of small grains; Occurrence of grain growth; Confirmation of growth mechanism by transmission electron microscopy.


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