TITLE

Focused ion beam imaging of grain growth in copper thin films

AUTHOR(S)
Gupta, J.; Harper, J.M.E.
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/10/1992, Vol. 61 Issue 6, p663
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the use of scanning ion microscopy for the imaging of grain structure of pure copper films. Implications for grain growth in annealing temperature; Observation of the growth and coalescence of small grains; Occurrence of grain growth; Confirmation of growth mechanism by transmission electron microscopy.
ACCESSION #
4232950

 

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