Real-time monitoring of a surface reaction in germanium film growth

Eres, Djula; Sharp, J.W.
June 1992
Applied Physics Letters;6/1/1992, Vol. 60 Issue 22, p2764
Academic Journal
Examines germanium film growth by a surface reaction using a pulsed molecular jet. Employment of time-resolved reflectometry for in situ monitoring of formation and chemisorbed layer of digermane evolution; Factors influencing the temperature independence of chemisorption rate; Occurrence of adsorption layers evolution.


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