TITLE

New six face lithography technique for realization of contacts on mum size

AUTHOR(S)
Charalambous, Melissa; Chaussy, Jacques
PUB. DATE
April 1992
SOURCE
Applied Physics Letters;4/6/1992, Vol. 60 Issue 14, p1759
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops a contact technique for the realization of metallic patterns on the six faces of a small single crystal. Steps involved in the etching technique; Injection of a current parallel to a single crystallographic axis; Determination of contact resistivities.
ACCESSION #
4232901

 

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