New six face lithography technique for realization of contacts on mum size

Charalambous, Melissa; Chaussy, Jacques
April 1992
Applied Physics Letters;4/6/1992, Vol. 60 Issue 14, p1759
Academic Journal
Develops a contact technique for the realization of metallic patterns on the six faces of a small single crystal. Steps involved in the etching technique; Injection of a current parallel to a single crystallographic axis; Determination of contact resistivities.


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