TITLE

Intensity oscillations in reflection high-energy electron diffraction during disilane gas source

AUTHOR(S)
Hiroi, Masayuki; Koyama, Kazuhisa
PUB. DATE
April 1992
SOURCE
Applied Physics Letters;4/6/1992, Vol. 60 Issue 14, p1723
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Analyzes the reflection high-energy electron diffraction intensity oscillations during disilane gas source molecular beam epitaxy. Details of the observed oscillations; Limitation of the growth rate on silicon (100) surfaces; Indication of monohydride structure on silicon (111) surface.
ACCESSION #
4232889

 

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