Doping profiles studied by scanning tunneling spectroscopy

Yi Chiu; Reed, M.L.
April 1992
Applied Physics Letters;4/6/1992, Vol. 60 Issue 14, p1715
Academic Journal
Analyzes the tunneling spectra of uniformly doped, ion-implanted, and epitaxial silicon samples. Use of metal-gap-semiconductor structure; Application of the scanning tunneling microscopy; Ways to obtain the two-dimensional doping profiles.


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