TITLE

Doping profiles studied by scanning tunneling spectroscopy

AUTHOR(S)
Yi Chiu; Reed, M.L.
PUB. DATE
April 1992
SOURCE
Applied Physics Letters;4/6/1992, Vol. 60 Issue 14, p1715
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Analyzes the tunneling spectra of uniformly doped, ion-implanted, and epitaxial silicon samples. Use of metal-gap-semiconductor structure; Application of the scanning tunneling microscopy; Ways to obtain the two-dimensional doping profiles.
ACCESSION #
4232886

 

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