TITLE

Anomalous local laser etching of copper by chlorine

AUTHOR(S)
Hua Tang; Herman, Irving P.
PUB. DATE
April 1992
SOURCE
Applied Physics Letters;4/27/1992, Vol. 60 Issue 17, p2164
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the laser etching of copper by chlorine. Use of a scanning continuous wave laser; Characterization of copper etching by a kinetic model; Effect of the nondesorbed copper chloride layer formation on the rate of copper chlorination; Relation between copper etch depth and scan rate.
ACCESSION #
4232862

 

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