Anomalous local laser etching of copper by chlorine

Hua Tang; Herman, Irving P.
April 1992
Applied Physics Letters;4/27/1992, Vol. 60 Issue 17, p2164
Academic Journal
Investigates the laser etching of copper by chlorine. Use of a scanning continuous wave laser; Characterization of copper etching by a kinetic model; Effect of the nondesorbed copper chloride layer formation on the rate of copper chlorination; Relation between copper etch depth and scan rate.


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