Electrical characteristics of paraelectric lead lanthanum zirconium titanate thin films for

Jones Jr., R.E.; Maniar, P.D.
February 1992
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p1022
Academic Journal
Investigates the electrical characteristics of paraelectric lead lanthanum zirconium titanate thin films. Implication for dynamic random access memory applications; Employment of sputter-deposited platinum electrodes to form thin-film capacitors; Suitability of the capacitors for planar bit cell capacitor requirements.


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