TITLE

Electrical characteristics of paraelectric lead lanthanum zirconium titanate thin films for

AUTHOR(S)
Jones Jr., R.E.; Maniar, P.D.
PUB. DATE
February 1992
SOURCE
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p1022
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the electrical characteristics of paraelectric lead lanthanum zirconium titanate thin films. Implication for dynamic random access memory applications; Employment of sputter-deposited platinum electrodes to form thin-film capacitors; Suitability of the capacitors for planar bit cell capacitor requirements.
ACCESSION #
4232817

 

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