Photoelectrochemical conductivity selective etch stops for SiC

Shor, J.S.; Osgood, R.M.
February 1992
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p1001
Academic Journal
Investigates the photoelectrochemical conductivity selective etch stops for silicon carbide (SiC). Details on the potential use of SiC semiconductor for high temperature and high frequency applications; Implication of SiC for etchant use in patterning devices; Demonstration on the patterning of n-type SiC epilayer.


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