InSb/In[sub 1-x]Al[sub x]Sb strained-layer superlattices grown by magnetron sputter epitaxy

Webb, James B.; Yousefi, G.H.
February 1992
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p998
Academic Journal
Examines the growth of InSb/In[sub 1-x]Al[sub x]Sb strained-layer superlattices using magnetron sputter epitaxy. Use of individually controlled magnetron sputter sources; Analysis on layer thicknesses using x-ray and cross-sectional transmission electron microscopy; Evidence on the production of an excellent crystallinity.


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