TITLE

InSb/In[sub 1-x]Al[sub x]Sb strained-layer superlattices grown by magnetron sputter epitaxy

AUTHOR(S)
Webb, James B.; Yousefi, G.H.
PUB. DATE
February 1992
SOURCE
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p998
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the growth of InSb/In[sub 1-x]Al[sub x]Sb strained-layer superlattices using magnetron sputter epitaxy. Use of individually controlled magnetron sputter sources; Analysis on layer thicknesses using x-ray and cross-sectional transmission electron microscopy; Evidence on the production of an excellent crystallinity.
ACCESSION #
4232809

 

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