TITLE

Visible luminescence from silicon wafers subjected to stain etches

AUTHOR(S)
Fathauer, R.W.; George, T.
PUB. DATE
February 1992
SOURCE
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p995
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the visible luminescence from silicon (Si) wafers subjected to stain etches. Components of stain layers caused by Si etching; Analysis on photoluminescence peaked in the red from stain-etched Si wafers; Similarity of photoluminescence spectra with porous Si films produced by anodic etching.
ACCESSION #
4232808

 

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