Visible luminescence from silicon wafers subjected to stain etches

Fathauer, R.W.; George, T.
February 1992
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p995
Academic Journal
Investigates the visible luminescence from silicon (Si) wafers subjected to stain etches. Components of stain layers caused by Si etching; Analysis on photoluminescence peaked in the red from stain-etched Si wafers; Similarity of photoluminescence spectra with porous Si films produced by anodic etching.


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