Structural characterization of low-temperature molecular beam epitaxial

Claverie, A.; Yu, K.M.
February 1992
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p989
Academic Journal
Investigates the structural characterization of low-temperature molecular beam epitaxial as-grown In[sub 0.52]Al[sub 0.48]As/InP heterolayers. Use of transmission electron microscopy and particle-induced x-ray emission; Influence of growth temperature on arsenic incorporation in layers; Factors influencing the formation of pyramidal defects.


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