TITLE

Role of hydrogen in synchrotron-radiation-stimulated evaporation of amorphous SiO[sub 2] and

AUTHOR(S)
Akazawa, H.; Takahashi, J.
PUB. DATE
February 1992
SOURCE
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p974
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the role of hydrogen in synchrotron-radiation-stimulated evaporation of amorphous silicon dioxide (SiO[sub 2]) and microcrystalline Si. Influence of ultrahigh vacuum and hydrogen ambients on amorphous SiO[sub 2]; Suggestion on the hindrance of a highly efficient decomposition process by hydrogen termination.
ACCESSION #
4232801

 

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