Role of hydrogen in synchrotron-radiation-stimulated evaporation of amorphous SiO[sub 2] and

Akazawa, H.; Takahashi, J.
February 1992
Applied Physics Letters;2/24/1992, Vol. 60 Issue 8, p974
Academic Journal
Examines the role of hydrogen in synchrotron-radiation-stimulated evaporation of amorphous silicon dioxide (SiO[sub 2]) and microcrystalline Si. Influence of ultrahigh vacuum and hydrogen ambients on amorphous SiO[sub 2]; Suggestion on the hindrance of a highly efficient decomposition process by hydrogen termination.


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