Experimental evidence of photoeffects in silicon rapid isothermal diffusion

Mavoori, J.; Singh, R.
October 1994
Applied Physics Letters;10/10/1994, Vol. 65 Issue 15, p1935
Academic Journal
Presents the photoeffects of silicon semiconductors induced by rapid isothermal diffusion. Development of rapid isothermal processing for the fabrication of optical and electronic devices; Sheet resistivity values for back and front side irradiation; Factors leading to higher diffusion coefficients and dopant activation in front irradiation configuration.


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