TITLE

Experimental evidence of photoeffects in silicon rapid isothermal diffusion

AUTHOR(S)
Mavoori, J.; Singh, R.
PUB. DATE
October 1994
SOURCE
Applied Physics Letters;10/10/1994, Vol. 65 Issue 15, p1935
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the photoeffects of silicon semiconductors induced by rapid isothermal diffusion. Development of rapid isothermal processing for the fabrication of optical and electronic devices; Sheet resistivity values for back and front side irradiation; Factors leading to higher diffusion coefficients and dopant activation in front irradiation configuration.
ACCESSION #
4227665

 

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