TITLE

Study on growth processes of particulates in helium-diluted silane rf plasmas using scanning

AUTHOR(S)
Shiratani, M.; Kawasaki, H.
PUB. DATE
October 1994
SOURCE
Applied Physics Letters;10/10/1994, Vol. 65 Issue 15, p1900
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the growth processes of surface contaminating particulates in helium-diluted silane radio frequency plasmas. Use of a scanning electron microscopic method; Phases of particulate growth; Details on the size distribution of particulates in each size group.
ACCESSION #
4227652

 

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