TITLE

Novel in situ method for locating virtual source in high-rate electron-beam evaporation

AUTHOR(S)
Bhatia, M.S.
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/11/1994, Vol. 65 Issue 2, p251
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Calculates the thickness distribution on extended substrates in high rate vacuum coating employing electron beam evaporators using virtual source. Establishment of the virtual source; Location of the virtual source at the desired deposition parameters; Description of the in situ method to locate the virtual source.
ACCESSION #
4227637

 

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