Novel in situ method for locating virtual source in high-rate electron-beam evaporation

Bhatia, M.S.
July 1994
Applied Physics Letters;7/11/1994, Vol. 65 Issue 2, p251
Academic Journal
Calculates the thickness distribution on extended substrates in high rate vacuum coating employing electron beam evaporators using virtual source. Establishment of the virtual source; Location of the virtual source at the desired deposition parameters; Description of the in situ method to locate the virtual source.


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