A new technique for diagnostics of a radio-frequency parallel-plate remote plasma

Sano, N.; Kohno, A.
July 1994
Applied Physics Letters;7/11/1994, Vol. 65 Issue 2, p162
Academic Journal
Develops a parallel-plate remote plasma reactor containing a metal grid between the powered and the grounded electrode. Measurement of the plasma parameters in radio frequency argon plasmas; Ranges of the electron density; Demonstration of the effective plasma confinement; Approximation of the electron energy distribution function.


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