TITLE

Silicon anodic-plasma oxidation during magnetron sputtering of yttria-stabilized zirconia

AUTHOR(S)
Beshenkov, V.G.; Marchenko, V.A.
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/11/1994, Vol. 65 Issue 2, p156
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the silicon anodic-plasma oxidation during magnetron sputtering of yttria-stabilized zirconia. Variation of floating potential in space and time; Dependence of the oxidation rate on the current density and the conducted charge; Increase secondary electron emission with primary electron energy.
ACCESSION #
4227605

 

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