TITLE

Optimization of diamond growth with statistical experiment design in an electron cyclotron

AUTHOR(S)
Ring, Z.; Mantei, T.D.
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/4/1994, Vol. 65 Issue 1, p121
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the use of multivariable statistically designed experiments to optimize diamond growth in a H[sub 2-CH[sub 4]-O[sub 2] magnetoactive plasma. Improvement of diamond crystallinity due to high oxygen concentrations; Influence of high oxygen concentrations on the degradation of film quality; Variables increasing the growth rate of diamonds.
ACCESSION #
4227594

 

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