Characterization of polycrystalline Al and Cu metal films sputtered on SiO[sub 2]/Si substrate

Yasuami, S.; Takase, T.
July 1994
Applied Physics Letters;7/4/1994, Vol. 65 Issue 1, p55
Academic Journal
Captures diffraction pattern from aluminum and copper granules of several microns in dimensions using Laue method with synchrotron x radiation. Comparison of reflection spots with the overall illuminated area; Indicators of the presence of stress in the aluminum granules; Possibility of granules to have suffered plastic deformation.


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