TITLE

Nitrogen stabilized <100> texture in chemical vapor deposited diamond films

AUTHOR(S)
Locher, R.; Wild, C.
PUB. DATE
July 1994
SOURCE
Applied Physics Letters;7/4/1994, Vol. 65 Issue 1, p34
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the influence of nitrogen impurities in CH[sub 4]/h[sub 2] gas mixtures on the structure and morphology of polycrystalline diamond films prepared by microwave plasma assisted chemical vapor deposition. Usage of optical emission spectroscopy to detect nitrogen in the plasma; Possibility of growing diamond films at low pressures.
ACCESSION #
4227565

 

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