Spatiotemporal characteristics determined by a relaxation continuum model of an inductively

Kondo, Kenji; Kuroda, Hidehiko
July 1994
Applied Physics Letters;7/4/1994, Vol. 65 Issue 1, p31
Academic Journal
Examines the use of an inductively coupled plasma (ICP) in material processing reactors. Evolution of ICP; Development of relaxation continuum model for a collision dominated ICP; Spatiotemporal characteristics of the ICP; Factors contributing to the dominant mechanism of power deposition in the ICP.


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