Processing dependence of the interfacial microstructure of Ag contacts to

Gong, Z.H.; Vassenden, F.
August 1993
Applied Physics Letters;8/9/1993, Vol. 63 Issue 6, p836
Academic Journal
Examines the interfacial microstructure of silver contacts on YBa[sub 2]Cu[sub 3]O[sub 7-delta] thin films through transmission electron microscopy. Mechanism of silver sputter deposition on thin films; Presence of amorphous interface zone in the silver contacts; Use of purity process gases to avoid formation of resistive interfacial layer.


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